| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-like product onto which information on defect inspection is recorded or attached while allowing quick and highly precise defect inspection of a film from its inside where fillers such as particles exist. SOLUTION: Two detecting optical systems are provided for oblique illumination and epi-illumination of a film-like inspected object where fillers such as particles different in optical property exist. The illuminating angle of an illumination light and the wavelength of the illumination light are selected to detect a defect and a difference in contrasting density of the fillers existing in the film from a picked-up image. In accordance therewith, the defect is discriminated. Besides, a defect type, a size and a defect detecting coordinate are recorded or attached as detection results, thereby improving the quality control of the film-like product and enhancing its added value. COPYRIGHT: (C)2008,JPO&INPIT
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