| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-reliability minute mass measuring sensor, having a minute mass measuring sensor element that uses a crystal oscillator whose one side is exposed and mounted to a container. SOLUTION: In the present invention for overcoming the problem, one face of the QCM (Quartz Crystal Microbalance) sensor is exposed on the total periphery of the first sensor container on the main face of the QCM sensor element, and the other face is sealed airtightly. The first QCM sensor container is fixed to the interior of the second QCM sensor container; alternatively, a pair of annular fixing tools are used for fixing the first QCM sensor container to the interior of the second QCM sensor container; and the first and/or the second QCM sensor containers comprises ceramics, glasses, crystals or plastics. COPYRIGHT: (C)2008,JPO&INPIT
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