| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film which has a further reduced friction coefficient and can be produced in a simple process. SOLUTION: The hard carbon film is formed of a stacked structure comprising the first layer and the second layer sequentially from the surface; has hard particles or granular protrusions on the utmost surface; and has a surface roughness (Ry) of 0.1 to 0.6μm. The first layer includes amorphous carbon as a main component, and Co and Ni of 1.4 to 39 atom% in total. Among aggregates existing in the first layer, aggregates having circle-equivalent diameters larger than 5 nm occupy 15% or less by an area rate, on a microscope image obtained through a transmission electron microscope. The second layer has at least one underlayer containing titanium nitride, carbonitrided titanium, titanium carbide, chromium nitride, nitrided titanium chromium and the like. When X% is defined as the area rate of a region occupied by the aggregates having the circle-equivalent diameters larger than 5 nm, and Y atom% is defined as the total content of Co and Ni contained in the film, X and Y satisfy the relationship expressed by X<4Y. COPYRIGHT: (C)2008,JPO&INPIT
|
