METHOD FOR CLEANING SURFACE OF QUARTZ GLASS

摘要

PROBLEM TO BE SOLVED: To provide a method capable of achieving excellent technical cleaning of the surface of a material constituted from quartz in a reproducible manner substantially without detriment to its surface properties. SOLUTION: Provided is a method for cleaning the surface of quartz glass comprising a multistage cleaning in acidic solutions, characterized in that the multistage cleaning comprises a former stage of cleaning in a hydrochloric acid cleaning solution under the action of hydrogen peroxide and a latter stage of cleaning in a nitric acid cleaning solution. COPYRIGHT: (C)2008,JPO&INPIT