| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer fixing device for stably and reliably fixing a wafer to a stage. SOLUTION: A head 20B of a wafer fixing screw 20 is provided abutting to the wafer W. A wafer fixing nut 30 is tightened to the screw 20A of the wafer fixing screw 20. Accordingly, a tightening force by the wafer fixing screw 20 and the wafer fixing nut 30 is transferred in direct to the area between the head 20B and the wafer W, and thereby the wafer W can surely be fixed under the condition that the wafer W is held between the head 20B of the wafer fixing screw 20 and the groove bottom of the wafer storing concave 12 of the stage 10. COPYRIGHT: (C)2008,JPO&INPIT |
