| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharge head improved in high density of its nozzles and downsizing of the head. SOLUTION: A piezoelectric element 32 is formed in the upper surface of a diaphragm 30 arranged in a pressure chamber plate 14, in a laminated flow path plate 100 constituting a head chip of an inkjet recording head 74, and a drive IC 42 driving the piezoelectric element 32 is formed in the lower surface 12B of a flow path plate 12. A through hole 44 is also formed which penetrates through the pressure chamber plate 14 and the flow path plate 12, and the through hole 44 is filled with a conductive paste 48, so that the piezoelectric element 32 and the drive IC 42 are electrically connected to each other by filling the through hole 44 with a conductive paste 48. By forming the piezoelectric element 32 and the drive IC 42 in the different surfaces in this manner, the high density of the nozzles and the downsizing of the head, is provided, compared with the constitution in which the piezoelectric element and the drive IC are formed in the same surface. COPYRIGHT: (C)2008,JPO&INPIT |
