| 摘要 |
A surface inspection apparatus ( 1 ) for detecting a defect on a surface of a sample 2 by inspecting an image captured of the surface of the sample 2 under a prescribed optical condition, comprises: a defect detection unit 24 for detecting a defect appearing in the captured image by using a prescribed detection condition, and an inspection condition determining unit 50 for setting at least one of the prescribed optical condition and the prescribed detection condition to a condition under which a known standard defect 9 formed in advance on an inspection surface of the sample 2 to be inspected can be detected using the defect detection unit 24.
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