Method of manufacturing a semiconductor device

摘要

There is the need to grind a semiconductor substrate from its back surface in order to thin a drift region for forming the NPT type IGBT. A collector region is then formed on the back surface of the semiconductor substrate by performing ion-implantation, a heat treatment and the like to the back surface of the semiconductor substrate of which the strength is weakened. This causes problems of warping the semiconductor substrate and the like. In a method of manufacturing a semiconductor device of the invention, the thickness of a drift region is previously adjusted by the thickness of an epitaxial layer. A collector region is then formed only by grinding a semiconductor substrate. In particular, using a semiconductor substrate containing a low concentration of impurity provides preferable characteristics for a high-speed switching element with a short turn-off time even when the collector region is thick.