| 摘要 |
A system and method for precisely detecting very small distances between a measurement probe having an elongated nozzle with a relatively long and thin orifice. The proximity sensor uses a constant gas flow and senses a mass flow rate within a pneumatic bridge to detect very small distances. The system and method use a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller that in various combinations allow for detection of very small distances in the nanometer to sub-nanometer range.
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