POLYGONAL BARREL SPUTTERING APPARATUS, SURFACE MODIFIED CARBON MATERIAL AND METHOD FOR MANUFACTURING THE SURFACE MODIFIED CARBON MATERIAL

摘要

This invention provides a polygonal barrel sputtering apparatus which can support a number of catalyst fine particles onto the outer surface of a carbon carrier, and a carbon supported catalyst and a method for manufacturing the carbon supported catalyst. The polygonal barrel sputtering apparatus comprises a vacuum vessel(1) of which the internal shape of the cross section substantially parallel to the gravitational direction is polygonal, a dispersing member, which is placed within the vacuum vessel (1), for dispersing secondary particles produced by the aggregation of primary particles of the carbon carrier (3) into primary particles or secondary particles which are smaller than the original secondary particles, a rotating mechanism for rotating the vacuum vessel around a rotation axis substantially vertical to the above cross section, and a sputtering target (2) disposed within the vacuum vessel (1). The polygonal barrel sputtering apparatus is characterized in that sputtering is carried out while carrying out rotation or pendulum operation of the vacuum vessel (1) with the rotating mechanism to agitate or rotate the carbon carrier (3) within the vacuum vessel to disperse the secondary particles of the carbon carrier (3) with the aid of the dispersing member, whereby fine particles or a thin film is supported on the surface of the carbon carrier (3).