| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image exposure recording device and an image exposure recording method, in which a moving stage is highly accurately moved in a desired moving direction to highly accurately record an image by exposure with extremely simple and inexpensive configuration. <P>SOLUTION: The moving stage 18 is moved in the Y direction shown as an arrow while yawing of the moving stage 18 is corrected by laser interference meters 25a, 25b; the distance to a bar mirror 19 fixed to an exposing plate 14 is measured with a laser displacement gauge 21 fixed to an X stage 15; the X stage 15 is displaced to in the X direction shown as an arrow to control the distance to be constant; and thereby, a substrate F fixed to a rotation stage 17 is moved straight in the Y direction of the arrow to highly accurately record an image at a desired position by exposure. <P>COPYRIGHT: (C)2008,JPO&INPIT |
