SUBSTRATE STAGE, AND HEAT TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate stage that prevents the occurrence of peeling electrification while having high wear resistance. SOLUTION: A prescribed emboss shape E is formed by emboss processing onto a placing face 12 formed in a stage body 11 so as to place a substrate W on it. Then, an amorphous alumina film A is formed by anodization. The alumina film A having an amorphous structure is dense and firm. Consequently, it is almost possible to prevent the occurrence of peeling electrification while having high wear resistance. COPYRIGHT: (C)2008,JPO&INPIT