| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck device for holding a substrate that can reliably attach and detach the substrate with a simple structure, and drops the substrate forcedly while the substrate is being aligned regardless of irregularity in the release of electrostatic attraction force. SOLUTION: A movable membrane 3 is recessed in an opening 1b open onto a substrate side surface 1a in an ordinal temperature/ordinal pressure state by mutually connecting a plurality of kinds of materials having different elongation percentages, thus holding the shape while being deformed in a recess. An increase in the internal pressure of the opening 1b allows the movable membrane 3 to project toward the substrate A from the opening 1b, thus forcibly separating the substrate A from a holding member 2 for separation reasonably. After that, by a drop in internal pressure at the opening 1b, the movable membrane 3 is deformed in an original recess shape by the difference in an expansion coefficient to hold the shape. COPYRIGHT: (C)2008,JPO&INPIT |
