| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film which has a further reduced friction coefficient and can be produced in a simple process. SOLUTION: The hard carbon film is formed of a stacked structure comprising the second layer of the utmost surface layer and the first layer of the underlayer. The second layer includes amorphous carbon as a main component, and 1.4 to 39 atom% of Co and Ni in total. Among aggregates 5 of Co or Ni existing in the second layer, aggregates having circle-equivalent diameters larger than 5 nm occupy 30% or less by an area rate, on a microscope image obtained when the second layer has been observed through a transmission electron microscope. The first layer is formed of diamond polycrystal. When X% is defined as the area rate of the region occupied by the aggregates having the circle-equivalent diameters larger than 5 nm on a sectional microscope image of the second layer, and Y atom% is defined as the total content of Co and Ni contained in the second layer, X and Y satisfy the expression of X<4Y. COPYRIGHT: (C)2008,JPO&INPIT |
