| 摘要 |
PROBLEM TO BE SOLVED: To simplify a mounting work of a cover part on an electron microscope. SOLUTION: The electron microscope main body part 1 composed of an electronic gun part 2 and a microscope tube 3 is placed on a pedestal cabinet 24, and its surrounding is sealed and surrounded by the cover part 6. At the cover part 6, a panel and open and close doors 11a, 11b and a window part 14 or the like are mounted on a frame part 29, and in the frame part 29, the rear part frame body surrounding the electron microscope main body part 1 and the rear part side of the pedestal cabinet 24 and the front part frame body surrounding the front part side are coupled. At mounting the cover part 6, the rear part frame body is firstly mounted, positioning of this rear part frame body against the pedestal cabinet 24 is carried out by positioning jigs 31a, 31b and positioning blocks 32a, 32b, the front part frame body is mounted on the positioned rear part frame body, and the frame body 6 is mounted. COPYRIGHT: (C)2008,JPO&INPIT
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