| 摘要 |
PROBLEM TO BE SOLVED: To provide an airtightness inspecting method more efficient and safer than a helium leak detector by airtight inspection of a miniaturized electronic component. SOLUTION: In this inspecting method of inspecting airtightness of an airtight-sealed package, the package is irradiated with far infrared rays by a far-infrared generating device for generating the far infrared rays, the frequency of the far infrared rays is varied, the far infrared rays are permeated through the package, and absorbed spectrum is detected, thereby efficiently inspecting the airtightness of the package of the miniaturized electronic component. COPYRIGHT: (C)2008,JPO&INPIT
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