| 摘要 |
A probe assembly, a probe unit, and a testing apparatus comprising the same are provided to sweep external particles off an electrode of an object to be inspected by using a cleaning unit, which is supported by a swing arm, through swing of the swing arm, thereby dispensing with a driving source for cleaning. A probe assembly(38) includes a probe(40), which is contactable with an electrode of an object to be inspected. The probe assembly is relatively movable toward at least the object for contact between the probe and the electrode. The probe assembly further includes a cleaning unit(46) for cleaning the electrode, and a swing arm(52) for holding the cleaning unit. When the object and the probe assembly move toward each other, the swing arm or the cleaning unit is contactable with the object so that the swing arm is swung due to relative movement of the object and the probe assembly. The cleaning unit sweeps the electrode by swing of the swing arm. |
