ITO GRANULAR POWER AND CYLINDRICAL MOLDED-OBJECT OF ITO TARGET HAVING THE SAME

摘要

An ITO granular powder and a cylindrical ITO molded article comprising the powder are provided to fill a mold more evenly in order to obtain better pressed density for high quality ITO thin film by employing granule type. An ITO granular powder is prepared by a process comprising steps of: preparing ITO slurry comprising ITO fine particles and organic binder (S100); drying the slurry (S110); and forming ITO granular powder (S120). The ITO fine particles comprise indium oxide and tin oxide, and the ITO slurry is stirred for mixing. The mean particle size of the prepared ITO granular powder is about 2-100mum, and the particle flows in a velocity of about 50-80g/second. The ITO granular particle optionally comprises about 10-25wt% of primary granular particles of which mean particle size is about 50-70mum, about 25-40wt% of secondary granular particles of which mean particle size is about 15-30mum, and 40-55wt% of third granular particles of which mean particle size is about 5-10mum. A cylindrical ITO target molded article comprising the powder is prepared by a process comprising steps of: forming ITO granular powder; filling a mold for ITO target molded article with the ITO granular powder; and pressing the ITO granular powder in the mold.