| 摘要 |
A probe cleaning sheet is provided to prevent abrasion of a probe during a cleaning process and to improve cleaning performance by using cleaning layer formed on a surface of a plastic sheet. A probe cleaning sheet(10) eliminates foreign substances attached on an end portion of a probe. The probe cleaning sheet is comprised of a plastic sheet(11) having a flat surface and a uniform thickness, and a cleaning layer(12) formed on a surface of the plastic sheet. The cleaning layer has a flat surface, a uniform thickness, and elasticity. As the elasticity characteristic of the cleaning layer, Young's modulus of the cleaning layer is in the range from 30 MPa to 700 MPa, and storage modulus at 25 °C is in the range from 1.2x10^8 dyn/cm^2 to 1.2x10^9 dyn/cm^2. The storage modulus at 25 °C of the cleaning layer is 1.2 times more than and 3.0 times less than storage modulus at 150 °C.
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