发明名称 Manufacturing method for variable shape mirror
摘要 <p>A variable shape mirror includes a support substrate provided with a conductive bonding portion that is divided into two areas bonded to a lamination type piezoelectric actuator. A bonding surface of the piezoelectric actuator is provided with a first metal film that is divided into a first area and a second area that are not connected to each other electrically. Side faces of the piezoelectric actuator are provided with a second metal film that connects a first common electrode to the first area electrically or connects a second common electrode to the second area electrically. The piezoelectric actuator is disposed on the bonding portion so that the individual areas of the first metal film are connected electrically to the different areas of the bonding portion, respectively.</p>
申请公布号 EP1887410(A2) 申请公布日期 2008.02.13
申请号 EP20070015372 申请日期 2007.08.06
申请人 FUNAI ELECTRIC CO., LTD.;THE RITSUMEIKAN TRUST 发明人 TANAKA, FUMINORI;TANAKA, KATSUHIKO;ISHII, AKIRA;SUGIYAMA, SUSUMU
分类号 G02B26/08;G02B26/06 主分类号 G02B26/08
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