| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning liquid to be used prior to stripping a resist, with the liquid in which the resist hardly stripped with only a conventional resist stripper can be easily removed. SOLUTION: Stripping of the resist is made easy by using the cleaning liquid containing ammonia or ammonium ion and having≥1% hydrogen peroxide concentration. COPYRIGHT: (C)2003,JPO |
