METHOD FOR PRODUCING THE ROTATABLE TARGET SINTERED ARTICLE AND ROTATABLE TARGET SINTERED ARTICLE PRODUCED BY THE METHOD

摘要

A rotary target sintered article and a method for fabricating the same are provided to allow the rotary target sintered article to have enhanced linearity and roundness by uniformly contracting a rotary target article. A method for fabricating a rotary target sintered article comprises the steps of providing a rotary target article(S2), and sintering the rotary target article by vertically installing the rotary target article on a plurality of support plates such that the rotary target article is uniformly contracted about the rotational center thereof(S3). The rotary target sintered article has roundness above 97%, and a height of about 300 to 3000mm. A thickness of a hollow section of the rotary target sintered article is about 5 to 10mm. The rotary target sintered article is made from ITO (indium tin oxide).