发明名称 |
METHODS OF PREPARING CONTROLLED POLARITY GROUP III-NITRIDE FILMS |
摘要 |
The present invention provides methods of preparing Group III-nitride films of controlled polarity and substrates coated with such controlled polarity films. In particular, the invention provides substrate preparation steps that optimize the substrate surface for facilitating growth of a Group III-polar film, an N-polar film, or a selectively patterned film with both a Group III-polar portion and an N-polar portion in precise positioning. The methods of the invention are particularly suited for use in CVD methods. |
申请公布号 |
EP1885918(A1) |
申请公布日期 |
2008.02.13 |
申请号 |
EP20050852374 |
申请日期 |
2005.11.29 |
申请人 |
NORTH CAROLINA STATE UNIVERSITY |
发明人 |
COLLAZO, RAMON, R.;SITAR, ZLATKO;SCHLESSER, RAOUL |
分类号 |
H01L21/02;C30B25/02;C30B25/18;C30B29/40 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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