AT CUT QUARTZ CRYSTAL RESONATOR ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

An AT-cut quartz crystal resonator and a manufacturing method thereof are provided to suppress unnecessary waves by confining energy in a Z'-axis direction. An AT-cut quartz crystal resonator(30) includes a crystal slice(31) and a pair of excitation electrodes(35a,35b). The crystal slice is made of an AT-cut crystal plate. The AT-cut crystal plate includes a side surface(32), a first crystal surface(33), and a third crystal surface(34). The side surface is a longer side of a cube which is longer in an X axis direction. The excitation electrodes are arranged on front and rear surfaces of the crystal surface. Masks are shifted in a Z'-direction of the quartz crystal on front and rear surfaces of the AT-cut crystal plate. Masks are wet-etched on the front and rear surfaces. The crystal slice is formed in a mesa shape.