发明名称 |
NANOSTRUCTURE PRODUCTION METHODS |
摘要 |
The present invention relates to a method of forming nanostructures or nanomaterials. The method comprises providing a thermal control barrier on a substrate and forming the nanostructures or nanomaterials. The method may, for example, be used to form carbon nanotubes by plasma enhanced chemical vapor deposition using a carbon containing gas plasma: The temperature of the substrate may be maintained at less than 350° C. while the carbon nanotubes are formed. |
申请公布号 |
EP1885909(A1) |
申请公布日期 |
2008.02.13 |
申请号 |
EP20060727077 |
申请日期 |
2006.05.11 |
申请人 |
SURREY NANOSYSTEMS LIMITED |
发明人 |
SILVA, SEMBUKUTIARACHILAGE, RAVI;JENSEN, BEN POUL;CHEN, GAUN, YOW |
分类号 |
C01B31/02;B82Y30/00;C23C16/26;C23C16/46 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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