| 摘要 |
<p>In an aluminum nitride single crystal , Si and C are dissolved, and a lattice constant of an a-axis is within a range of 3.0935 [Å] or more to 3.1110 [Å] or less. In such a way, a lattice constant of the aluminum nitride single crystal is controlled in response to lattice constants of functional layers to be formed, thus making it possible to form, with good crystallinity, the functional layers having a variety of compositions.</p> |
