Ultrasonic horn, and ultrasonic bonding apparatus using the ultrasonic horn

摘要

An ultrasonic bonding apparatus for applying a pressing load and ultrasonic vibrations to multiple objects to be bonded comprises: an ultrasonic horn formed as a horizontally symmetrical inverse triangle having two apexes besides a lower apex facing downwards; a vibrator attached to at least one apex of the ultrasonic horn for inputting ultrasonic vibrations in a direction facing the lower apex; and a load applying device linked to a portion on the ultrasonic horn which is above the lower apex and near the symmetry axis thereof, for applying a downwards pressing load to the ultrasonic horn. An abutting member for applying a pressing load and ultrasonic vibrations to the objects to be bonded is provided at the lower apex of the horn. This provides an ultrasonic bonding apparatus wherein flexing does not occur at the ultrasonic horn due to the applied load, and a uniform load and ultrasonic vibrations are applied to the entire bonding face, yielding uniform and high-quality bonding.