POLAR FLUID REMOVAL FROM SURFACES USING SUPERCRITICAL FLUIDS,申请号EP20060740890-传众专利搜索

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发明名称	POLAR FLUID REMOVAL FROM SURFACES USING SUPERCRITICAL FLUIDS
摘要
申请公布号	EP1886341(A1)	申请公布日期	2008.02.13
申请号	EP20060740890	申请日期	2006.04.12
申请人	MICRON TECHNOLOGY, INC.	发明人	FARRAR, PAUL, A.
分类号	H01L21/311;B08B7/00	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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