发明名称 Process byproduct trap and system including same
摘要 A trap device including at least one substance delivery element for introducing a substance therein is disclosed. The delivered substance may influence the nature of deposits that have formed within the trap device, may influence the formation of deposits within the trap device, or may cause a precipitate to form. Deposit interaction elements may be employed to influence the distribution or redistribution of deposits within the trap device. Deposit interaction elements may effect thermal conditions, introduce substances, or physically interact with deposits within the trap device. Further, a storage region within the trap device may be used to accumulate deposits. In one embodiment, a substantially continuous path through the trap device may be maintained or preserved so that deposits form within the trap device except substantially along the path. The present invention also encompasses a method of operation of a trap device as well as a system incorporating same.
申请公布号 US7329292(B2) 申请公布日期 2008.02.12
申请号 US20050259490 申请日期 2005.10.25
申请人 MICRON TECHNOLOGY, INC. 发明人 MARDIAN ALLEN P.;CAMPBELL PHILIP H.
分类号 B01D41/00;B01D5/00;B01D53/00;B01D53/68;C23C16/44 主分类号 B01D41/00
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