| 摘要 |
The variable shape mirror ( 1 ) includes a substrate ( 2 ) and a bulk piezoelectric body ( 3 ). On the piezoelectric body ( 3 ), a specular surface ( 4 ) is formed, and further a plurality of grooves ( 5 a- 5 e) are formed at a predetermined interval. The grooves ( 5 a- 5 e) are arranged so as to surround the specular surface ( 4 ) and filled with the conductive members. The conductive members embedded in the grooves ( 5 a- 5 e) are connected electrically to one of a pair of common electrodes ( 7 a and 7 b) that is disposed to cross the grooves ( 5 a- 5 e) and are formed to be electrodes having different polarities in alternating manner in the direction from the inner side to the outer side of the grooves ( 5 a- 5 e).
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