ROTATABLE TARGET ASSEMBLY

摘要

A rotatable target assembly is provided to prevent a sputtering target from running idle due to expansion of the sputtering target. A rotatable target assembly comprises a hollow rotary roller(160), a sputtering target(120) installed on an outer circumference of the rotary roller, and a cooling insert(140) interposed between the rotary roller and the sputtering target and has heat conductivity greater than that of the sputtering tagert. The cooling insert includes thermosetting resin and metal. The metal cooling insert has a spherical or polygonal shape, and is dispersed in the thermosetting resin. The polygonal shape has an edge length of 0.1 to 100 microns. The cooling insert has a heat expansion coefficient less than and equal to that of the sputtering target.