| 摘要 |
A method for mixing a chemical liquid, and an apparatus for mixing a chemical liquid are provided to allow the Caro's acid effective for the stripping of resist from a substrate to be generated when sulfuric acid and oxygenated water (hydrogen peroxide) are mixed. A method for mixing a chemical liquid comprises the steps of preparing an inner bath(10), an outer bath(12), a return pipe(14), and a return pump(16); filling the inner bath with sulfuric acid fully and allowing the sulfuric acid overflown from the inner bath to flow into the outer bath; flowing oxygenated water to the outer bath; and operating the return pump when the oxygenated water is supplied and flowing the oxygenated water and sulfuric acid of the outer bath into the inner bath simultaneously, thereby mixing oxygenated water and sulfuric acid. |
