发明名称 APPARATUS AND METHOD FOR TESTING A SEMICONDUCTOR DEVICE
摘要 A method for testing a semiconductor device is provided to improve test reliability by performing a test process in two steps within a minimum interval of time. A first test process is performed on the entire test item of a number of semiconductor devices selected from a plurality of semiconductor devices formed on a wafer. According to the test result, a second test process is performed on a number of test items selected from the entire test items of the rest of the semiconductor devices. A test item for performing the second test process can include a test item selected according to the result of the first test process and a test item selected regardless of the first test process.
申请公布号 KR20080012452(A) 申请公布日期 2008.02.12
申请号 KR20060073279 申请日期 2006.08.03
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM, HYUN JOO
分类号 H01L21/66 主分类号 H01L21/66
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