| 摘要 |
A system uses reflectance spectrophotometry to characterize a sample having any number of structures. The system uses toroidal mirrors that are shaped in such a way that the angle of reflectance off of the target is small. The small angle of reflectance may allow for simplification of calculations and can result in a faster processing time. In addition, a more accurate measurement can be achieved when the reflected beam is close to normal.
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