MANUFACTURING METHOD OF SINGLE.CHIP SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, PROGRAM DEBUG METHOD AND MANUFACTURING METHOD OF MICRO CONTROLLER

摘要

A method for fabricating a semiconductor integrated circuit device of a single chip is provided to produce a semiconductor integrated circuit device of a single chip including a mask ROM(read only memory) by memorizing a final program determined by using a programmable ROM in a second mask ROM of a second semiconductor integrated circuit substrate having substantially the same structure as a second semiconductor integrated circuit substrate. A first mask ROM in which a program is not memorized is prepared. A first semiconductor integrated circuit substrate(10) having a first inner bus to which the first mask ROM is to be connected as a metal interconnection is prepared. While the first mask ROM is electrically insulated from the first inner bus, a programmable ROM(15) independent of the first semiconductor integrated circuit substrate is electrically connected to the first inner bus. The first semiconductor integrated circuit substrate and the programmable ROM are sealed in the same semiconductor package. A final program determined by using the programmable ROM is memorized in a second mask ROM of a second semiconductor integrated circuit substrate having substantially the same structure as the first semiconductor integrated circuit substrate by using an ion implantation technique. The second mask ROM is electrically connected to a second inner bus of the second semiconductor integrated circuit substrate by a metal interconnection.