DEVICE MANUFACTURING SUPPORT APPARATUS, SIMULATION METHOD FOR DEVICE MANUFACTURING SUPPORT APPARATUS, AND DEVICE MANUFACTURING APPARATUS

摘要

An apparatus for supporting fabrication of a device is provided to determine an optimum parameter for fabricating a device by simulating a fabricating process. A parameter setting part(11) sets a parameter in a simulator. A process simulator(12) simulates the fabricating process of a device by using the set parameter. A device simulator(13) simulates the characteristic of a device by using the simulation result of the fabricating process. An evaluating part(16) evaluates the simulation result of the device characteristic. A determining part(17) determines a parameter based upon the evaluated result. A calibrator(14,15) calibrates the parameter of the simulator based upon actual measurement of a plurality of fabricating processes.