CLEAN STOCKER AND KEEPING METHOD OF ARTICLE

摘要

A clean stocker is provided to keep an article taken out form a receptacle cleanly by installing an article keeping shelf in an upper portion and a receptacle keeping shelf in a lower portion and by supplying a down flow of clean gas. An open/close apparatus is installed to load or unload an article into or from a receptacle. A keeping shelf of the article unloaded from the receptacle is installed in an upper portion and a receptacle keeping shelf is installed in a lower portion wherein the article keeping shelf and the receptacle keeping shelf are vertically overlapped from a planar point of view. A receptacle transfer apparatus transfers the receptacle among the open/close apparatus, the inlet of a storage box and the keeping shelf of the receptacle. An article transfer apparatus transfers the article between the open/close apparatus and the article keeping shelf. The article keeping shelf and the receptacle keeping shelf are rotational shelves independently and horizontally rotating.