发明名称 EXPOSURE EQUIPMENT FOR PRINTED CIRCUIT BOARD
摘要 An exposure apparatus for a printed circuit board is provided to block the inflow of a contaminant from the outside and to minimize the interference of light by installing a light source part, a lens and a mirror inside a vacuum chamber, thereby improving the exposure performance. An exposure apparatus for a printed circuit board comprises a chamber(10) which is provided with a transmissive window(11) at one side and has a sealed structure; a light source part(20) which is installed at the one side of the chamber and comprises a UV lamp and a reflector for collecting the light irradiated from the lam; a first reflection mirror(30) which reflects vertically the light irradiated from the light source part; a fly eye lens(40) which makes the intensity of the reflected light be uniform; second and third reflection mirrors(32,34) which convert the pathway of the light passed trough the fly eye lens; and a collimation mirror(45) which is installed parallel with the third reflection mirror to change the reflected light to a parallel light and to irradiate the light on the exposure surface of a printed circuit board through the transmissive window.
申请公布号 KR20080011752(A) 申请公布日期 2008.02.11
申请号 KR20060072127 申请日期 2006.07.31
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 PARK, JONG WON;JANG, JONG SIK;MOON, HYUN IL
分类号 G03F7/20;G03F7/207 主分类号 G03F7/20
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