发明名称 |
EXPOSURE EQUIPMENT FOR PRINTED CIRCUIT BOARD |
摘要 |
An exposure apparatus for a printed circuit board is provided to block the inflow of a contaminant from the outside and to minimize the interference of light by installing a light source part, a lens and a mirror inside a vacuum chamber, thereby improving the exposure performance. An exposure apparatus for a printed circuit board comprises a chamber(10) which is provided with a transmissive window(11) at one side and has a sealed structure; a light source part(20) which is installed at the one side of the chamber and comprises a UV lamp and a reflector for collecting the light irradiated from the lam; a first reflection mirror(30) which reflects vertically the light irradiated from the light source part; a fly eye lens(40) which makes the intensity of the reflected light be uniform; second and third reflection mirrors(32,34) which convert the pathway of the light passed trough the fly eye lens; and a collimation mirror(45) which is installed parallel with the third reflection mirror to change the reflected light to a parallel light and to irradiate the light on the exposure surface of a printed circuit board through the transmissive window.
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申请公布号 |
KR20080011752(A) |
申请公布日期 |
2008.02.11 |
申请号 |
KR20060072127 |
申请日期 |
2006.07.31 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
PARK, JONG WON;JANG, JONG SIK;MOON, HYUN IL |
分类号 |
G03F7/20;G03F7/207 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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