| 摘要 |
An apparatus for processing gas is provided to avoid various accidents caused by silane gas by installing a plurality of detection parts by which an operator, at various points of a gas processing apparatus, check whether silane gas is introduced. A gas process part(407) is filled with an adsorbing agent and remove a chemical material introduced from a process chamber(401), connected to the process chamber by an introduction line(403). A first detection part(405) checks the quantity of the chemical material in the introduction line, installed in the introduction line. A plurality of second detection parts check the quantity of the chemical material in the gas process part, installed in the gas process part. An exhaust line exhaust the residue left behind, connected to the gas process part. According to the flow of the chemical material, the second detection parts can include a lower detection part(409) installed at the lower end of the gas process part, an intermediate detection part(411) installed in the intermediate part of the gas process part, and an upper detection part(413) installed in the upper end of the gas process part.
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