| 摘要 |
PROBLEM TO BE SOLVED: To reduce damage due to a foreign matter generated by a driving part for chucking and a driving part for washing. SOLUTION: An index table 10 is provided in a washing chamber 3 and a drying chamber 4 as a front chamber via a partitioning member 2 partitioning into the front and rear parts. The index table 10 is provided with a chuck 25. A first motor 25C as a driving part of the chuck 25 is provided in a machine chamber 5 as a rear chamber via the partitioning member 2. Thereby, dust, dirt and the like caused by operation of the first motor 25C are not generated on the washing chamber 3 side and thus foreign matters of the dust, the dirt and the like never adhere to a substrate D to be washed or the substrate D after washing. Dust, dirt and the like caused by the operation of a driving part for washing are never generated on the washing chamber 3 side by providing the driving part for washing of a washing device in the machine chamber 5 via the partitioning member 2. COPYRIGHT: (C)2008,JPO&INPIT
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