| 摘要 |
<p>A linear movement mechanism and a transport robot using the same are provided to reduce costs for manufacturing by positioning a driving source under ambient atmosphere while the transport robot is in vacuum. A linear movement mechanism includes a guide member(1), movement members, a driving unit(3A), a driving pulley(31B), and driving sources(M3,M4). The movement members moves along a movement stroke(GL) and is connected with an output belt(33) through a connecting member. The movement stroke is formed in a horizontal linear shape and is set on the guide member. The driving unit includes the output belt. The output belt reciprocates along predetermined reciprocating sections(3Aa,3Bb) by being rotated with being hung on the driving pulley(31B). The predetermined reciprocating sections are parallel with the movement stroke. The driving sources drive the driving pulley. The driving unit and the driving sources are supported by the guide member.</p> |
