| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric element having a desired characteristic in a short time. <P>SOLUTION: In the manufacturing method, a plurality of targets containing substances different from each other are arranged in a chamber to which a gas for discharge is fed, and substrates are arranged in a predetermined positional relationship to the targets. The plurality of targets are respectively sputtered, and a piezoelectric element is formed on the substrate from substances generated from each of the plurality of targets. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
