发明名称 |
Optical spot geometric parameter determination using calibration targets |
摘要 |
A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.
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申请公布号 |
US2008024781(A1) |
申请公布日期 |
2008.01.31 |
申请号 |
US20070828666 |
申请日期 |
2007.07.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ZANGOOIE SHAHIN;YOUNG ROGER M.;ZHOU LIN;BOTTINI CLEMENTE;FIEGE RONALD D. |
分类号 |
G01B9/08 |
主分类号 |
G01B9/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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