发明名称 SUPPORT FOR AN OPTICAL ELEMENT
摘要 <p>There is provided an optical element module comprising an optical element and a support structure supporting the optical element. The support structure comprises a force exerting device, the force exerting device being mechanically connected to the optical element and being adapted to exert a force on the optical element when a negative pressure is acting within the force exerting device.</p>
申请公布号 WO2008012336(A1) 申请公布日期 2008.01.31
申请号 WO2007EP57689 申请日期 2007.07.25
申请人 CARL ZEISS SMT AG;KWAN, YIM-BUN PATRICK;XALTER, STEFAN;SOEMERS, HERMAN M.J.R.;DE WEERDT, R.;BENSCHOP, A.F.;STOMMEN, BERNARD;VAN DEUREN, FRANS 发明人 KWAN, YIM-BUN PATRICK;XALTER, STEFAN;SOEMERS, HERMAN M.J.R.;DE WEERDT, R.;BENSCHOP, A.F.;STOMMEN, BERNARD;VAN DEUREN, FRANS
分类号 G03F7/20 主分类号 G03F7/20
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