| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inverted mesa type crystal vibration piece and a method of manufacturing the same that can suitably be made practical by suppressing a leak of vibration from an excitation part to increase an energy confinement effect and make a CI value small, securing mechanical strength, and improving shock resistance. <P>SOLUTION: The crystal vibration piece 21 has: a crystal element piece comprising a thin excitation part 22, a thick reinforced frame 23 disposed across a through groove 24, and support parts 25 and 26 which are formed on the same plane as the excitation part with the same thickness and couple the excitation part and the reinforced frame together in one body; excitation electrodes 27a and 27b provided on top and reverse surfaces of the excitation part; connection electrodes 28 and 29 provided at the reinforced frame; and lead-out electrodes 30 and 31 which connect the respective excitation electrodes to the corresponding connection electrodes. The support parts are heated at a temperature higher than the αβ transition point of a crystal by irradiating metal thin films formed on their surfaces with laser light to form a twin crystal. <P>COPYRIGHT: (C)2008,JPO&INPIT |
