DIAMOND COATING FILM AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a diamond coating film superior in friction characteristics. SOLUTION: The diamond coating film 102 is formed by using an aerosol deposition method in which fine particles of diamond are used as a raw material. The diamond coating film 102 is a polycrystalline film, and has a mean crystal particle size of 1 nm to 500 nm, a denseness of 60% to 99%, and a film thickness of 5 nm to 100μm. COPYRIGHT: (C)2008,JPO&INPIT