| 摘要 |
It is an object of the present invention to provide an appearance inspection apparatus capable of analyzing a difference in detection characteristics of detection signals obtained by a plurality of detectors, and capable of flexibly meeting various inspection purposes without changing a circuit or software. An appearance inspection apparatus including a sample stage 101 for supporting a sample 100, an illumination light source 103 for irradiating the sample 100 on the sample stage 101 with illumination light 111, a plurality of detectors 120 a to 120 d which are disposed at different positions from each other with respect to an illumination light spot of the illumination light source 103, and which detect scattered light 112 generated from a surface of the sample 100, a signal synthesizing section 105 which synthesizes detection signals from the plurality of detectors 120 a to 120 d in accordance with a set condition, an input operating section 109 for setting a synthesizing condition of the detection signal by the signal synthesizing section 105, and an information display section 108 for displaying a synthesizing map 220 a structured based on a synthesized signal which is synthesized by the signal synthesizing section 105 in accordance with a condition set by the input operating section 109.
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