发明名称 |
SINTERED METAL COMPONENTS FOR CRYSTAL GROWTH REACTORS |
摘要 |
<p>An injector apparatus for a crystal growth reactor having a graphite casing, a stainless steel nozzle, a nozzle holder to position the nozzle within the graphite casing, a lower injector disposed within the graphite casing and extending around the nozzle to a point above the nozzle to direct gas flow from the nozzle, an upper injector comprising metal carbide disposed within the casing above the lower injector and spaced apart from the lower injector, and an upper injector.</p> |
申请公布号 |
WO2008014446(A2) |
申请公布日期 |
2008.01.31 |
申请号 |
WO2007US74575 |
申请日期 |
2007.07.27 |
申请人 |
CARACAL, INC.;KORDINA, OLOF CLAES ERIK;RAO, SHAILAJA |
发明人 |
KORDINA, OLOF CLAES ERIK;RAO, SHAILAJA |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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