| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface contamination inspection apparatus having excellent operability and high safety. SOLUTION: The apparatus is provided with a contamination sampler 1 provided in a cell where an object to be inspected 13 whose surface contamination is inspected is housed, to sample a surface contamination of the object 13 by the filter paper 8, a filter paper supply/retrieval apparatus 2 provided in the cell to supply and retrieve the filter paper 8 to and from the contamination sampler 1, and tray conveying equipment 14 which is provided in a through hole 6 piercing a wall 12 isolating the outside and inside of the cell and conveys a tray 9 with the filter paper 8 on. COPYRIGHT: (C)2008,JPO&INPIT
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