HIGH-SPEED IMAGING APPARATUS FOR ELECTROMAGNETIC-FIELD

摘要

PROBLEM TO BE SOLVED: To speedily acquire electromagnetic near-field distributions radiated from a specimen. SOLUTION: When an illumination device 11 irradiates a probe 12 with light amplitude-modulated at a frequency fLO, an electromagnetic field of a frequency fRFradiated from a specimenαlocally changes birefringence characteristics of the probe 12 to generate a state of local polarization in the illumination light. The sate of local polarization in detecting light containing a difference frequency componentΔf(¾fLO-fRF¾) between a modulation frequency fLOof the illumination light and the frequency fRFof the electromagnetic field radiated from the specimenαis converted into local intensity of light and imaged by an image sensor 13c of an imaging apparatus 13. An image processing device 14 performs arithmetic processing on pixel signals extracted by the image sensor 13c for every pixel to generate a two-dimensional image of an electromagnetic near-field distribution radiated from the specimenαand display it on an image display device 15. COPYRIGHT: (C)2008,JPO&INPIT